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6-axis control unit [Improving the quality of produced products]

Achieving 10nm order alignment with a 6-axis control unit.

A 6-axis control unit that enables parallelism adjustment on the order of 10nm, thanks to high-precision sensing capabilities and a precise alignment mechanism. Previously, the mechanism achieved an accuracy on the order of 0.1μm, but by utilizing a special sensing mechanism and a precise alignment mechanism, alignment on the order of 10nm has been realized. Improving the quality of production products allows for an approach in a more high-definition process.